","showArrow_4":true,"aiSet_3":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1},"aiSet_1":1,"space_1":0,"dataList_2":[{"href_3":{"type":"none","value":"","target":""},"text_3":"这里是占位文字"},{"href_3":{"type":"none","value":"","target":""},"text_3":"这里是占位文字"},{"href_3":{"type":"none","value":"","target":""},"text_3":"这里是占位文字"},{"href_3":{"type":"none","value":"","target":""},"text_3":"这里是占位文字"},{"href_3":{"type":"none","value":"","target":""},"text_3":"这里是占位文字"},{"href_3":{"type":"none","value":"","target":""},"text_3":"这里是占位文字"}],"close_4":"","dataList_4":[{"navName":"首页"},{"children":[{"children":[{"navName":"企业介绍"},{"navName":"发展历程"},{"navName":"关于我们"}],"navName":"企业介绍"},{"navName":"发展历程"},{"navName":"关于我们"}],"navName":"公司概况"},{"navName":"我们的产品"},{"children":[{"navName":"最新动态"},{"navName":"企业新闻"},{"navName":"行业新闻"}],"navName":"新闻资讯"},{"children":[{"navName":"合作伙伴"},{"navName":"加入我们"}],"navName":"招商加盟"},{"children":[{"navName":"服务宗旨"},{"navName":"在线咨询"},{"children":[{"navName":"生活常识"},{"navName":"百度百科"}],"navName":"常见问题"},{"navName":"用户协议"}],"navName":"售后服务"},{"children":[{"navName":"在线留言"},{"navName":"联系我们"}],"navName":"联系我们"}],"imgList1_1":[],"mopx_4":768,"imgList2_1":[],"href_1":{"transport":[],"type":"link","value":"/","target":"_self"},"prompt_3":"","imgList_1":[{"imageUrl":"https://omo-oss-image.thefastimg.com/portal-saas/zz0000001/cms/image/1ae01267-3f66-4ff1-a803-1ffe5bfcbcac.jpg"}],"href_3":{"transport":[],"type":"field","value":"vywmo","target":"_blank"},"setting_1":{"fit":"contain","errorUrl":"","needThumb":"true","isLazy":"true"},"pageConfig_2":{"pcColumn":20,"loopItem":".p_loopItem","pcRow":20,"moColumn":20,"status":true,"datasourceid":"datasource1","elementid":2},"menu_4":"","text_3":"这里是占位文字","html_11":"","useclick_4":false,"title_1":"图片名称","dense_3":""}" />

全部

全部

搜索

首页

MetronFilm-MS

显微反射膜厚测量仪

微区膜厚表征

最小光斑5μm

MetronFilm-MS 是一款显微级膜厚检测专业设备，基于光学非接触技术，用于精密快速检测微小区域薄膜的厚度及其光学常数。MetronFilm-MS采用自研高分辨光谱仪，搭配强大智能算法，配合小光斑和多款不同倍率的物镜，不但可以进行透明或半透明的微区或精密小件的膜层厚度及光学常数（n&k）的无损测量，还能实现可视化样品对准，方便确认微区样品并精准表征。

超宽测量范围 2nm~60μm*，微区测量也可做到从超薄膜至厚膜达到超广覆盖。

溯源NIST，测量准确性有保证

先进的拟合算法，适用多种先进工艺，可测晶圆单/多层膜的厚度和n&k

微光斑技术结合补偿算法消除背反射（测量透明样品）

可视化样品对准，方便微区测量

拟合速度快，检测耗时数量级下降

超宽测量范围 2nm~60μm*，微区测量也可做到从超薄膜至厚膜达到超广覆盖。

溯源NIST，测量准确性有保证

先进的拟合算法，适用多种先进工艺，可测晶圆单/多层膜的厚度和n&k

微光斑技术结合补偿算法消除背反射（测量透明样品）

可视化样品对准，方便微区测量

拟合速度快，检测耗时数量级下降

技术参数

技术参数	参数指标
波长范围	可选190 - 1100nm或380-1100nm
光源	卤素灯+氘灯或卤素灯
5X物镜厚度测量范围^*	15nm-60μm@VIS
10X物镜厚度测量范围^*1	15nm-60μm@VIS，2nm-60μm@UV+VIS
15X物镜厚度测量范围^*1	15nm-60μm@VIS，2nm-60μm@UV+VIS
50X物镜测量范围^*	20nm-2μm@VIS
测量n和 k厚度要求^*	50nm
准确度* :	2nm@≦1000nm，或0.2%@≧1000nm²
精度³	0.02nm²
稳定性⁴	0.05nm²
样品尺寸	最大300mm
微区显示	支持

* 取决于材料
1.    反射式物镜（紫外扩展）
2.    50X物镜暂时无法满足
3.    在连续 5 天内，对 1μm 厚的硅基二氧化硅（SiO₂-on-Si）薄膜每日进行 100 次测量，此值为这些每日平均值的标准偏差值的平均值（1σ）
4.    在连续 5天内，对 1μm 厚的硅基二氧化硅（SiO₂-on-Si）薄膜每日进行 100 次测量，此值为这些每日平均值的 2 倍标准差（2σ）

应用领域

	半导体制程		显示面板
	微小区域内工艺薄膜膜厚和光学常数检测、电介质薄膜膜厚和光学常数检测，等等。例如：分立光电器件、LED 芯片、激光芯片、PD / 光电探测器上的电极区介质膜、增透膜等；又例如微型传感器芯片、MEMS 器件的表面薄膜、钝化膜、绝缘膜等的微小区域薄膜的厚度及其光学常数精密快速检测。也常用于半导体的科研、研发过程中的阵列小件的定点微区测量、多点矩阵测量等；例如研发中针对阵列小件单颗单元、局部功能区、微结构区域做精准单点检测，又例如实验室中小尺寸自制样件、多组阵列、二维材料 / 钙钛矿等新型薄膜样品，因尺寸极小，仅适配微区光斑测量。		LCD/OLED面板、手机盖板、TP、显示模组、摄像头里，有大量微米级的图案化、窄条、微区的区域膜厚测量的要求。包括： 1. OLED 显示层：例如5–20μm的像素定义区（PDL）需要测定 PI、有机层、ITO等膜层厚度；10–30μm区域的像素间沟槽，需测定残留光刻胶、绝缘层的膜层厚度；1–5μm区域的微腔结构测定HTL/EML/ETL有机膜的膜厚； 2. LCD 彩膜和偏光片：10–20μm 格状的BM 黑矩阵需要测厚度均匀性，15–30μm 像素区需要测膜厚差，50μm左右的贴合区需要测胶层厚度等等； 3. 手机的盖板或触控区：20–50μm的盖板边缘强化区需测定硬化层、AF 防指纹膜等；10μm的屏下指纹区需要测光学胶、滤光膜等 4. 封装/背板（Mini-LED/Micro-LED）：20–50μm划片槽（scribe line）需要测 SiO₂、SiNx、光刻胶残留；5–10μm微焊盘需要测钝化层厚度等

精密光学元件		生命科学
在生态研微型透镜、棱镜、光学滤光片、微型窗口片（镀膜仅局部区域）的膜厚检测，还有光纤端面、光纤头、光芯片端面镀膜的微小区域膜厚及其光学常数检测；另外还有大量曲面镜、球面镜的测定需要小光斑测量其弧面的膜层。究和农业管理中，太阳诱导叶绿素荧光（SIF）测试信号非常微弱，需要光谱仪具备足够高的光谱分辨率才能进行解析		医疗器械微型组件、内窥镜微小镜头等的镀膜厚度及光学常数无损检测；医疗设备或其它生物医学器械防腐蚀涂层（例如心脏支架、注射器涂层、器械腔体零件涂层等）的厚度无损检测、钝化和/或药物输送涂层的厚度无损检测，药物载体或控释屏障如可降解高分子薄膜等的厚度无损检测，等等。

应用

案例

钙钛矿激光器

瞬稳态荧光

分析仪器

gora

显微荧光寿命在有机发光材料研究中的应用

2015年，一篇文章，首次报道了一种具有高品质因子单晶正方微盘形貌的CH3NH3PbBr3材料（一种有机钙钛矿材料），为on-chip电泵浦相干光源的制造提供了优异的候选材料。

点击查看

钙钛矿激光器

瞬稳态荧光

分析仪器

gora

显微荧光寿命在纳米激光器研究中的应用

2017年7月，一篇发表于ACS Nano 的文章首次报道了一种室温下宽带可调的全无机铯卤化铅亚微米球单模激光器。

点击查看

参考文献

相关产品

产品资料

MetronFilm-MS 显微反射膜厚仪

立即下载

预览

","imgList2_2":[],"space_2":0,"arrow_14":"","space_7":0,"space_8":0,"prompt_3":"","prompt_10":"","prompt_4":"","prompt_11":"","prompt_5":"","prompt_6":"","imgList_2":[{"imageUrl":"https://omo-oss-image.thefastimg.com/portal-saas/zz0000001/cms/image/1ae01267-3f66-4ff1-a803-1ffe5bfcbcac.jpg"}],"prompt_9":"","prompt_12":"","imgList_7":[{"imageUrl":"https://omo-oss-image.thefastimg.com/portal-saas/zz0000001/cms/image/1ae01267-3f66-4ff1-a803-1ffe5bfcbcac.jpg"}],"imgList_8":[{"imageUrl":"https://omo-oss-image.thefastimg.com/portal-saas/zz0000001/cms/image/1ae01267-3f66-4ff1-a803-1ffe5bfcbcac.jpg"}],"dense_10":"","aiSet_12":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1},"aiSet_11":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1},"dense_12":"","aiSet_10":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1},"dense_11":"","href_9":{"type":"none","value":"","target":""},"href_8":{"type":"none","value":"","target":""},"href_5":{"type":"none","value":"","target":""},"href_4":{"type":"none","value":"","target":""},"href_7":{"type":"none","value":"","target":""},"href_6":{"type":"none","value":"","target":""},"dataList_14":[{"img":"","navId":"1818916","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"域名注册","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"云虚拟主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"云服务器","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"独立IP主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"独立服务器租用","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"服务器租用","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"}],"navName":"产品中心","sort":1818916,"parentId":"0","url":"/","target":"blank"},{"img":"","navId":"1818917","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/82f320ab-9e75-4eb7-9717-08cc20ebb289.jpg","navId":"1818922","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/9d1476ac-f880-4bc2-8930-1e43d9f84b28.jpg","navId":"1818926","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818928","navName":"内容管理","sort":1818928,"parentId":"1818926","url":"/","target":"blank"}],"navName":"三级内容","sort":1818926,"parentId":"1818922","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/9d1476ac-f880-4bc2-8930-1e43d9f84b28.jpg","navId":"1818926","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818928","navName":"内容管理","sort":1818928,"parentId":"1818926","url":"/","target":"blank"}],"navName":"三级内容比较长","sort":1818926,"parentId":"1818922","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/9d1476ac-f880-4bc2-8930-1e43d9f84b28.jpg","navId":"1818926","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818928","navName":"内容管理","sort":1818928,"parentId":"1818926","url":"/","target":"blank"}],"navName":"三级内容","sort":1818926,"parentId":"1818922","url":"/","target":"blank"}],"navName":"新葡萄amg8883","sort":1818922,"parentId":"1818917","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818923","navName":"董事长致辞","sort":1818923,"parentId":"1818917","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818923","navName":"WHMCS财务系统","sort":1818923,"parentId":"1818917","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818923","navName":"DirectAdmin面板","sort":1818923,"parentId":"1818917","url":"/","target":"blank"}],"navName":"服务支持","sort":1818917,"parentId":"0","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/c371279c-a631-4cd0-8ec8-d287918a149e.jpg","navId":"1818918","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818928","navName":"系统维护","sort":1818928,"parentId":"1818926","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818928","navName":"帮助中心","sort":1818928,"parentId":"1818926","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818928","navName":"渠道代理","sort":1818928,"parentId":"1818926","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818928","navName":"数据中心","sort":1818928,"parentId":"1818926","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/5439ba8c-bedb-4b7e-8ff6-c34451778d30.jpg","navId":"1818928","navName":"增值服务","sort":1818928,"parentId":"1818926","url":"/","target":"blank"}],"navName":"技术服务","sort":1818918,"parentId":"0","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/0054907d-1a14-4969-ac12-430b96347775.jpg","navId":"1818919","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"云服务器","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"净重服务器","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"净重虚拟主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"净重云主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"净重免备案主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"净重高防服务器租用","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"}],"navName":"优质产品","sort":1818919,"parentId":"0","url":"/","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/863b48bd-3797-4013-aedf-fdcceb86731c.png","navId":"1818920","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"域名注册","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"云虚拟主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"云服务器","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"独立IP主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"独立服务器租用","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"}],"navName":"联系我们","sort":1818920,"parentId":"0","url":"/","target":"blank"},{"img":"","navId":"1818921","children":[{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"域名注册","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"云虚拟主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"云服务器","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"独立IP主机","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"},{"img":"portal-saas/demo_a0f0c15013fa42c5a035c530f75506f9/cms/image/4bddcd56-35ec-4b9a-8173-7e903bde54d8.jpg","navId":"1818930","navName":"独立服务器租用","sort":1818930,"parentId":"1818919","url":"http://www.baidu.com","target":"blank"}],"navName":"新闻资讯","sort":1818921,"parentId":"0","url":"/","target":"blank"}],"setting_2":{"fit":"contain","errorUrl":"","needThumb":"true","isLazy":"true"},"showArrow_14":true,"setting_7":{"fit":"contain","errorUrl":"","needThumb":"true","isLazy":"true"},"setting_8":{"fit":"contain","errorUrl":"","needThumb":"true","isLazy":"true"},"aiSet_3":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1},"imgList1_7":[],"aiSet_4":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1},"imgList1_8":[],"aiSet_2":1,"close_14":"","imgList1_2":[],"href_3":{"type":"none","value":"","target":""},"href_2":{"type":"none","value":"","target":""},"aiSet_7":1,"aiSet_8":1,"aiSet_5":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1},"href_12":{"type":"none","value":"","target":""},"aiSet_6":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1},"href_11":{"type":"none","value":"","target":""},"href_10":{"type":"none","value":"","target":""},"aiSet_9":{"contentKeywords":"生成一段${{公司名称}}${{行业}}的公司简介内容","type":1}}" />